This XYZ three-axis positioning is made of aluminum alloy.
The stage size is 40 x 40 mm.
The Range of Travel is 15 mm.The Load Capacity is 3 kg.
The resolution
is 0.2 µm / 0.1 µm with 10 / 20 micro-step per step
motor driver.
The typical repeatability accuracy is ±0.5 µm.
The typical positioning accuracy is 5 µm.
The maximum speed is 10 mm / sec.
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